纳米级尺度实物标准是纳米尺寸传递体系中的关键环节，也是评价和校正压电驱动等微扫描微定位装置的重要工具。

Nanometer scale step standards are the keys for dimension transfer, and they are the important tools to evaluate and calibrate micro actuator and micro position devices such as piezoelectric scanner.

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结合检测装置和微机控制系统，设计并研制了基于前馈控制同数字PID反馈控制相结合的复合控制的微定位系统。

Combining computer system and detecting device, the micro-positioning system of compound control is designed and researched. This system is based on feedforward and digital PID control.

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该装置以组合量块为标准，采用可换向的单测头和成本较低的电感测微仪进行定位测量。

The new measurement system of thermal deformation adopts combined gauges as standard length, single switchable measuring head and inductance micrometers to carry on relative measurement.

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