Lots of high-tech fields depend on micro position technique. Since piezoelectric micro position technique has a great deal strongpoint, it is turning into study hotspot both here and abroad.
许多高科技领域都需要微定位技术的支持，压电微定位技术由于有诸多优点，正成为近年国内外的研究热点。
参考来源 - 空间分布压电驱动的多自由度微定位工作台位姿控制模型与实验研究The fine pointing micro-positioning experiment systems are built laterFirstly, on the basis of analyzing the principle of APT system,executing APT task by using compound-axis control structure is proposed.
精瞄偏转镜是精瞄微定位系统的核心部件,通过精瞄偏转镜的偏转运动完成光路的调整。
参考来源 - 激光星间通信终端精瞄微定位系统关键技术的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
纳米级尺度实物标准是纳米尺寸传递体系中的关键环节，也是评价和校正压电驱动等微扫描微定位装置的重要工具。
Nanometer scale step standards are the keys for dimension transfer, and they are the important tools to evaluate and calibrate micro actuator and micro position devices such as piezoelectric scanner.
本实用新型涉及一种用于平面磨削主动控制的新型数控纳米级微定位工作平台。
The utility model relates to a novel numerical control nano-positioning workbench used for grinding and actively controlling a plane.
此隔振设计方法对超精密机床、超微定位机构超低传递率隔振设计有一定的参考价值。
This isolation designing method has a certain value of reference to isolation design on super-low transmission ratio of super-precision machine tools and super-micro positioning mechanisms, etc.
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