6-DOF micro table is an important part of nanometer three coordinate measuring machine (COMERO). It is used to realize precision orientation and hardware correction of spacial compositive error of workpiece.
六自由度微动工作台为纳米三坐标测量机的重要部件，用于实现工件的精密定位和空间综合误差的硬件修正，要求能实现六自由度的运动且具有纳米级的运动定位精度。
参考来源 - 纳米六自由度微动工作台机械设计·2,447,543篇论文数据，部分数据来源于NoteExpress
为研究微动工作台提供了参考。
This provides reference for the research on micro-motion platform.
介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。
A kind of piezoelectric micro-actuator with Nano-step and long range, based on the principle of inchworm motion, is introduced in this paper.
微动工作台是微机械系统的重要组成部分，是实现高精度定位的关键部件。
The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning.
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