微机电系统加工工艺 making technology of mems
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
参考来源 - 电子束光刻的Monte Carlo模拟及邻近效应校正技术研究Results of the research and experiments in this paper are beneficial to design and fabrication of micro thruster. The micro machining technology can also be used for other MEMS products.
论文的相关研究和实验结果对于微推进器的设计、制作具有一定的参考价值,微加工工艺的相关研究结论也可以应用在其它微机电器件的制作上。
参考来源 - MEMS固体微推进器的设计与制作Results of the research and experiments in this paper are beneficial to deign and fabrication of MEMS slapper detonator. The micro machining technology can also be used for other MEMS products.
论文的相关研究和实验结果对于MEMS冲击片雷管的设计、制作具有一定的参考价值,微加工工艺的相关研究结论也可以应用在其它微机电器件的制作上。
参考来源 - 新型冲击片雷管设计与制作关键技术研究·2,447,543篇论文数据，部分数据来源于NoteExpress
采用微加工工艺制备出一种聚合物微锥阵列。
A fabrication process has been developed to form a polymer micro tip arrays using micromachining.
相比之下，只有五，六层是可能使用标准的微加工工艺。
In comparison, only five or six layers are possible using standard micromachining processes.
用表面硅微加工工艺研制了一种用于薄膜热容测量的新型微桥量热计。
A micro bridge calorimeter fabricated with silicon surface micro-fabrication technology is developed for testing heat capacity of thin films.
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