底电极结构不断更新。
通过比较薄膜的结构,探讨了薄膜底电极对薄膜结构的影响。
The effect of the bottom electrodes on the structures of thin films is investigated by comparing the structures of thin films.
结果表明,制得的LNO薄膜可用作集成铁电薄膜器件的底电极。
Our results showed that the LNO thin films could be used as bottom electrodes for integrated ferroelectric thin film devices.
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