使用平板印刷机、办公室打印机或者复印机是不可能复制或形成这些特征的。

This feature is impossible to duplicate or produce using a letter press, an office printer, or a copying machine (see Figure 1).

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本发明公开一种设备和方法，用于在更换平板印刷机(10)中工件(208)期间，将浸没流体(212)保持在邻接投射透镜(16)的间隙中。

An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed.

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