介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
系统分别采用光流技术和显微干涉技术，结合频闪照明的方法，对MEMS器件的面内和离面运动特性进行了测量。
This system employed optical flow technology and microscopic interferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices.
文中还给出了在同步辐射实验室显微术光束线中用激光干涉法制作高分辨率软X波带板的光学系统。
The con figuration of aplanat for making high resolution X-ray Zone plate to be used in beam line of Synchrotron Radiation Laboratory is also presented.
应用推荐