同时，通过对一台数控铣床的测量后，发现激光干涉仪测量法更适合于机床定位精度的快速评定。
Meanwhile, we found that the latter one is more suitable for measuring machine tools linear positioning accuracy after inspecting a vertical milling machine by using the laser interferometer.
利用主动相位补偿法有效地消除了干涉仪系统的相位漂移。
The random shifting of the initiative phase noise is suppressed through the passive phase compensating method.
本文用有效光源法分析了正交光栅干涉仪的干涉图。
The interference pattern of a cross-grating interferometer is analyzed by the so-calledeffective source approach.
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