plate characteristics
... 屏极电阻 plate resistance 屏极特性 plate characteristic 阳极屏极 anode ...
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屏极特性曲线 anode characteristic ; plate characteristic
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溅射特性研究结果表明：屏极电压和溅射气压对离子束均匀性和束流密度影响显著；
The results about the research on the characters of ion beam sputtering show that grid voltage and sputtering gas pressure have great influences on ion beam distribution and current.
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