对准标记是置于掩模版和硅片上用于确定它们的位置和方向的可见图形。
misc. alignment mark
... 段落标记 paragraph mark 对准标记 registration marks 多级树状林拓扑结构 multiple-tree forest topology ...
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其次分析影响相位光栅对准标记衍射效率的主要因素槽深、占空比和反射率;
Alignment signal of phase grating alignment mark and the factors of influece of alignment signal are analysed secondly;
从实验的结果来看,这种方法能够对对准标记达到很好的边缘定位,提高了对准精度。
From the results of experimentation, the method can make the mark image edge achieve good edge localization and improve the alignment precision.
对准传动轴和轭上安装参考标记,安装传递轴。
Align the installation reference marks on the propeller shaft and yoke and install the propeller shaft.
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