讨论了采用浸液式光刻获得的成像结果和套刻结果。

In this paper we discuss the results on imaging and overlay obtained with immersion.

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激光直写系统的应用，可以分成一次曝光制作光刻掩模和多次套刻曝光制作器件两个方面。

Mask making with one step exposure and device making with multiple overlay exposure are applications of the system.

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俭省不是这一刻的选项（尽管美国人个人储蓄正在增加！） 提出一套紧巴巴的刺激方案难以看出有什么好。

Austerity is not an option at the moment (though private American saving is increasing!), and it's hard to see the good in offering a meagre stimulus package.

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