给出了一种微光刻图形CIF格式的中间挖空多边形切割成PG 3600格式所需矩形的新算法。
A new algorithm which is used to transform center-hollowed polygons of CIF format in microlithography pattern into rectangles of PG3600 format is presented.
电子束曝光机版图切割过程中可能出现带内孔的多边形，并且多边形内环与外环之间可能发生重叠。
During the layerout cutting process for thee beam lithography system, some polygons with one or more inner holes may appear.
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