...偏测量术； 外差干涉； 非线性误差； 薄膜测量； 声光调制器 [gap=1321]Key words: ellipsometry; heterodyne interferometer; nonlinearity error; film measurement; acoustooptic modulator ..
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A kind of non-contact test method of optical surface with big curvature radius by using spatial carrier heterodyne interferometry on the plane interferometer is mainly studied in the dissertation.
本文主要研究了一种非接触检测大曲率半径光学零件表面面形的方法,提出了在平面干涉仪上运用空间载频外差干涉术进行面形检测。
参考来源 - 利用空间载频外差干涉术在平面干涉仪上实现大曲率光学零件的检测Making use of heterodyne interferometry and dual-differential phase discrimination technology, the Single-focus Attitude Measuring (SAM) system obtains a high measuring resolution, which reaches 0.089nm, and thus is capable of measuring minor displacement as well as minor velocity.
该系统采用外差干涉和相位细分技术,测量分辨率达到0.089nm,满足了高分辨率的测量要求,因而可用于微小位移、微小速度的测量。
参考来源 - 磁头飞行姿态测量系统的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
目的为半导体激光器合成外差干涉研制一调制驱动电源。
Aim To develop a laser diode modulated driver power for synthesis heterodyne interference.
结论该调制驱动电源满足各种波形的合成外差干涉，具有广泛的应用价值。
Conclusion All kinds of waveform synthesis heterodyne interferences based on laser diode can be implemented using this modulated drive power and it can be used widely.
介绍了两种激光外差干涉信号的处理方法锁相频率解调法及组合频率解调法。
Two kinds of signal processing methods for heterodyne interferometer, phase locked frequency demodulation and combinatorial frequency demodulation are presented in this paper.
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