本论文研究利用CO_2激光作为热源加工制备熔锥光纤耦合型光学球微谐振腔器件。
In this paper, we had studied the CO_2 laser fabrication of microsphere resonators coupled by biconical tapered fibers.
针对成型电极在微细加工中暴露出的缺点，提出了利用旋转微细电极像微铣刀一样进行微细电解铣削新工艺，加工出高精度型孔和悬臂梁等微结构。
The new process of electrochemical milling by rotating microelectrode like micro milling-(cutter) was proposed, and micro profiled hole and micro beam with high precision can be milled.
介绍了一种具有更高加工分辨率且可直接成形三维复杂微型器件的一次曝光型微立体光刻成形装置。
An once exposition micro stereo-lithography prototyping device with higher machining resolution and can be used for directly prototyping 3d complex microstructure is introduced in this paper.
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