在MEMS光开关阵列设计中,扩展性是一项非常重要的指标。
Expansibility is a very important performance for the design of MEMS optical switch array.
设计了新型的光开关器件,该器件建立在掺杂电光材料的一维光子晶体上。
The switch bases on one-dimensional photonic crystal doped by electro-optical material.
本论文在比较各种类型光开关的特点的基础上,结合现有的工艺条件,完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
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