本文对微电子固体薄膜结构，以及影响薄膜电阻导电性和稳定性的因素进行了研究和分析。
This paper study and analysis microelectronic solid film construction and factor that effect the film resistor conductivity and constantity.
“污染等级”是指固体、液体或气体恶化绝缘强度或表面电阻率的程度。
"Pollution degree" describes the degree to which a soild liquid or gas which deteriorates dielectric strength or surf ace resistivity is adhering.
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