研究了偏心率和转速比对去除效率的影响，与此同时研究了抛光模材料、抛光模胶层厚度、抛光模直径以及几何形状与去除效率的关系。
At the same time the effect of eccentricity ratio, speed ratio and the material, thickness of sub, geometry shape of polished die on removing efficiency are studied.
结果表明，影响凝胶注模陶瓷坯片密度的因素主要有：料浆的固含量、单体含量、单体和胶联剂的比值。
The research showed that the solid loading, content of monomer and ratio of monomer and crossing linker were the main effect factors on the density.
建立了描述厚层光刻胶内衍射光场形成过程的物理模型，并利用傅里叶模方法模拟计算和分析了其内部衍射光场分布。
Then Fourier model method, mostly applied to study the diffractive properties of gratings is adopted to analyze the diffractive image field in thick film photo resist.
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