提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。

A novel in-situ non-flatness measurement method of wafer stage mirrors in a step-and scan lithographic tool is presented.

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北京电视台：请问，这一次六方会谈的气氛是否比第一次要好一些？

Beijing TV Station: is the atmosphere of this round of talks better than that of the first round?

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当日下午，吴淑珍将就"二次金改"弊案遭台检方第7次约谈。

Wu will be questioned for the 7th time concerning the "second financial reform program" scandal Tuesday afternoon.

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