电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。

Electromagnetic micromotor is an ideal micro actuator for MEMS, micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications.

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利用内建场增强离子发射模型和可动离子中性化模型对实验结果进行了分析与计算，理论与实验吻合较好。

Experimental results were analyzed by means of built-in field enhanced ion emission model and ion neutralized models, which coincides well with the experiment results.

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用金属材料制成的一体化可动结构和叠层式压电元件可组成蛇型步进式直线驱动器，能实现高精度、高可靠性的直线步进驱动。

The snake-step linear actuator is constructed based on the integrated moving structure made by metal and the stack PZT, it can achieve the line-step moving of high accuracy and high reliability.

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