对一种先进的双悬臂梁高量程MEMS加速度计的单芯片封装工艺进行了失效机理分析。
Failure analysis is conducted for the single chip packaging process of an advanced high-range MEMS accelerometer with double cantilever beams.
基于光的偏振特性、马吕斯定理和法拉第旋光效应，采用同光源双光路检测，实现了大量程直线位移的测量。
Based on characteristics of optical polarizing, Malus law, and Faraday optical rotation, a long-range displacement detector is realized by same light source and double light route.
双轴自动电子倾斜测试仪是一个高精度、大量程的角度倾斜测量仪器。
The dip angle measuring system with an electrolytic bubble is a small dip angle measuring system with high accuracy and great measuring range.
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