利用朗缪尔静电双探针诊断了蒸发镀膜装置反应室内等离子体密度及分析其分布规律，并分析了气压和功率对等离子体分布的影响。

The characteristic of spatial distribution of plasma ion density in reaction chamber were diagnosed by a Langmuir double probe, and the effect of Ar pressure and RF power were also investigated.

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使用指定样式和文化特性特定格式，将数字的字串表示转换为其对等的双精度浮点数。

Converts the string representation of a number in a specified style and culture-specific format to its double-precision floating-point number equivalent.

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将数字的字串表示转换为其对等的双精度浮点数。

Converts the string representation of a number to its double-precision floating-point number equivalent.

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