介绍在IBM及其兼容系列微型机上，实现硅压力传感器版图CAD软件的设计方法。
The paper describes that a silicon pressure sensor with plate graph CAD software design is carried out on IBM and its series of compatible microcomputers.
从理论上阐述了微悬桥结构气体流速传感器的工作原理，设计了微悬桥的结构、工艺版图以及其电路系统。
The structure of micro cantilever bridge, the photolithographic mask and the circuit system of the sensor is designed.
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