它包括彼此间具有小间隙的 上下两片印刷电路板。
The utility model comprises an upper and lower printed circuit boards with a small clearance between each other;
本发明公开一种设备和方法,用于在更换平板印刷机(10)中工件(208)期间,将浸没流体(212)保持在邻接投射透镜(16)的间隙中。
An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed.
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