其控制装置由加工工具、能量传感器、温度传感器、加法器、调节阀、低温液体发生器以及前馈控制器和反馈控制器组成。

Its control device is comprised of processing tool, energy sensor, temp. sensor, addition apparatus, regulating valve, low temp. liquid generator, and forward feed and feedback controllers.

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结合检测装置和微机控制系统，设计并研制了基于前馈控制同数字PID反馈控制相结合的复合控制的微定位系统。

Combining computer system and detecting device, the micro-positioning system of compound control is designed and researched. This system is based on feedforward and digital PID control.

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