另外，尔必达还将继续评估将HKMG技术应用到其30/25nm节点制程的可能性。
In addition, Elpida will continue to evaluate and improve HKMG in order to apply the technology at the 30nm and 25nm nodes.
毫无疑问，将逻辑芯片的制程推进到22/20nm节点是一个挑战。
Needless to say, the 22-/20-nm logic node will be challenging.
据报道Intel正在使用这款光刻机开发其22nm节点制程逻辑芯片产品.目前尼康是Intel32nm制程芯片关键层制造用光刻设备的独家供应商。
The tool is reportedly being used for the development of Intel Corp.’s 22-nm logic node. With a different tool, Nikon was the sole lithography vendor for the critical layers at Intel’s 32-nm node.
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