硅片的一部分经掩膜后进行SF6干法刻蚀，从而使集流器能够连接到外电路上。
Part of the silicon layer was masked and dry etched with SF6 gas to allow connection of the current-collector to the outside circuit.
某一组分经高精度、中低压的计量泵计量进入静态混合器，并进入预混料罐循环；
One composition enters the static mixer after metering through high-accurate and medium-low-pressure metering pump and goes into the premixing bank for cycling.
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