misc. clean room ; clean area
,to obtain a reasonable switching capacity. The device is fabricated in the clean room, improvement has been made in the structure.
对于所设计的器件在净化室进行了多次流片,并进行了相应的结构上的改进。
参考来源 - 无弧MEMS电接触器·2,447,543篇论文数据,部分数据来源于NoteExpress
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