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利用重离子注入形成光波导表现出独特的优点：与轻离子注入相比，注入剂量可以降低1 ~ 3个数量级，可以大大降低制造成本。
Waveguides formed by heavy ions implantation show an unique advantages: the beam dose can be 1-3 order lower than that of light ion implantation and it can reduce the fabrication cost significantly.
光波导以其独特的性质，在各种光器件的制造中起着重要的作用。
The specific properties of the waveguide have made waveguide play an important role in the fabrication of various optical devices.
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