... optical goniometer 光学测角计 optical grating measuring system 光栅测量系统 optical gyroscope 光陀螺仪 ...
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本文介绍一种新的测试方法,利用光栅运动的多普勒效应,实现速度或位移测量的单光栅测量系统。
A new testing method is introduced in the paper, the speed and displacement single grating measuring system has been realized by using Doppler effect of grating moving.
从MOS图像传感器构成的粗线纹光栅位移测量系统的原理出发,对光栅测量系统的精度和跟踪速度这两个最重要的问题进行了理论分析。
Based on the principle of coarse grating displacement measurement system made of MOS sensor, the relationships between track velocities and accuracy of the system are analyzed theoretically.
由于光栅干涉测量系统以光栅栅距作为测量基准,相对于传统干涉仪,光栅尺系统受环境因素造成的测量误差影响较小。
Because the measurement standard of grating system is grating pitch, compared to usual interferometer, diffractive grating, system reduces environment influence on measurement accuracy.
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