制作垂直、光滑的光栅槽面是制作EDG的关键。
Etching vertical and smooth grating facet is the basic of the fabrication of EDG.
对用于ICF驱动器分频光栅的刻槽深度进行了优化，使其具有更优的分频效果。
In this paper, the depth of color separation grating applied in ICF system is optimized firstly for good separating effect.
亚微米光栅型导光板通过光栅空频控制出射光方向、控制槽深调节衍射效率，达到导光板出射光强的均匀性。
The transmission angle is controlled by grating frequency and the diffraction efficiency is controlled by groove depth of sub-micro gratings to get uniformity of transmission filed.
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