实验研究了铝膜厚度对衍射光栅闪耀效率的影响，给出了铝膜厚度系数的最佳范围。
It also represents the influences of aluminum film thickness on blazed efficiencies of the ruling diffraction gratings and provides proper ranges of the thickness factors.
通过利用严格的耦合波理论计算光栅衍射效率的方法，分别编制出了计算te波和TM波的衍射效率程序。
Using the method of rigorous coupled-wave theory to compute the diffraction efficiency of a grating, the program for calculating diffraction efficiency for both te and TM polarization is made.
理论分析和实验测试证明，该工艺方法能够将MEMS闪耀光栅的衍射效率提高10%左右。
Theoretical analysis and experiments have demonstrated that the technology can improve diffraction efficiency of MEMS blazed gratings for about 10% or so.
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