介绍了一种基于光杠杆原理的光学微位移测量系统。
A nanometer system for displacement measurement is described, which is based on the principle of optical lever.
光杠杆法是原子力显微镜(afm)悬臂定位的主要方法。
Optical lever method is a main technique to detect the cantilever's position in atomic force microscope (AFM).
利用光电位置传感器和二维双光杠杆放大，能够测量出二维微小距离的变化。
The change of two dimensional micro distance is measured by using a position sensor and the two dimensional amplification of double optical lever.
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