Based on light interference, diffraction and optical holography theory, the paper comprehensively describes the basic principle, main types, development trend as well as the objective and significance for carrying out the research of laser maskless interferometric lithography and holographic lithography.
本论文基于光的干涉和衍射及光学全息照相理论，综合评述了光学光刻的基本原理、主要类型、发展趋势及开展激光无掩模干涉光刻和全息光刻研究的目的和意义。
参考来源 - 激光干涉光刻技术·2,447,543篇论文数据，部分数据来源于NoteExpress
为光学全息提供了可视化的验证。
它除具有普通光学全息的优点外，还有其特殊的优越性。
Besides of the advantages of conventional optical holography, it also has its special superiorities.
利用光学全息的抗撕毁性，研究它在信息隐藏方面的应用。
Based on the characteristics of the holography, its application in information hiding is researched.
应用推荐