设计了基于环路径向剪切干涉检测光学元件面形的光路系统。
The optical system for optics measurement is designed based on this technique.
本发明公开了一种数字干涉条纹分析方法及光学元件面形检测装置。
The invention discloses a method for analyzing digital interference fringe and a device for detecting optical component surface shape.
仪器还可测量晶体材料折射率均匀性、晶体元件面形、角度、平行度等。
This instrument can also measure the refractive-index homogeneity, the flatness, the Angle error, the wedge Angle of crystal element.
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