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倾斜沉积技术制备的雕塑薄膜是一种新型的、具有各向异性结构的薄膜材料。
Sculptured thin film grown by glancing Angle deposition technique is a new type of engineered columnar thin films with anisotropy.
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倾斜沉积是一种新型的薄膜沉积技术。
Glancing Angle deposition is a new technology for thin film preparation.
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