俄歇电子发射，表面灵敏性，俄歇电子谱的测量，定性和定量分析，深度剖析等。
The content of this article includes Auger electron emission, surface sensitivity, measurement of Auger electron spectrum, qualitative and quantitative analysis, depth profile etc.
实际建立的系统包括激光器、外光路系统、真空制样室、俄歇能谱仪、电子发射测量仪。
The total system comprise laser, external ray system, vacuum chamber, AES and emission electron surveyor.
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