本文采用交替施加高偏压和低偏压的方法，合成出了具有软膜和硬膜结构的无氢类金刚石多层膜。
Using an alternating high- and low-bias voltage, we have formed hydrogen-free multilayers of hard and soft diamond-like carbon films.
适用于要求大容量，使用温度范围接近于室温的旁路、耦合等，及低直流偏压电路中。
Ideally suited for bypassing and coupling application circuits operating with low DC bias in the environment approaching to room temperature.
结果表明，在低的偏压情况下，团簇比较松散地堆积在衬底上；
The results showed that the clusters were gently stocked one above the other in low bias voltage;
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