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光刻伺服盘是一种新的磁头伺服定位技术。
Lithography servo disk is a new servo locating technique for magnetic head.
针对气动系统的非线性，提出一种模糊pid控制算法，使用高速开关阀，对气动执行器进行伺服定位控制。
A fuzzy PID control method was presented which controls the pneumatic actuator servo position system using high-speed switching valves.
采用该方法，虽然舍弃了由位置传感器构成位置回路的常规设计方法，但情报雷达伺服系统仍然有较高的定位精度。
Although the general design method of the position loop composed of the position sensor is abnegate, but the information radar servo system has high orientation precision in this way.
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