affinity bond
亲合势键 affinity bond
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硅片直接键合(SDB) 技术的关键在于硅片表面的亲水处理, 本文分析了亲水处理之微观机理。
Successful Silicon to silicon direct bonding(SDB)mainly depend on the hydrophilicity treatment of silicon surface. Micro mechanism of hydrophilicity has been analyzed in the paper for the first time.
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