本文以氮化钛的CVD制备为例，说明了源物质的选择对CVD过程的影响。
Based on the preparation of titanium nitride, the effects for the choice of the precursor on the CVD systems have been illustrated.
其特征在于，所说的钛源为一维纳米二氧化钛。
The invention is characterized in that the titanium source is one-dimensional nanometer titanium oxide.
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