n. unevenness
...rol)应用在CMP制程上时，一般都是使用R2R(Run-to-Run)制程控制的方式来做移除率(Remove Rate, RR)或 不均匀度 ( Non-Uniformity )的控制。
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The experiment result : In some constant flow ,the unequality degree of particle decreases while concentration of particle increases.
实验结果表明：当液体流量一定时，颗粒的不均匀度随浓度增加而减小。
参考来源 - 管内液固循环流化床流动特性研究The experiment, which water is the medium, is a single-tube cold model. Observe the condition of uniform membrane around the wall of heat exchange tube and analyzing the variation of unwell-distributed coefficient under different spray density.
以水为介质进行了单管冷模实验,观察在不同的喷淋密度下换热管内壁的成膜情况,分析了在不同喷淋密度下成膜不均匀度的变化规律。
参考来源 - 新型竖管降膜式吸收器液体成膜装置实验研究Before the front header reformed, the distribution of particle in the pipe bundle was very non-homogeneous. After the front header added import and the back plate, the non-homogeneous in the pipe bundle has been induced with increasing the flux.
在未改造前,颗粒在各管束的分布极不均匀,当增加入口和挡板后,随着液体流量的增加,管束中固含率的不均匀度都减小。
参考来源 - 水平多管液固循环流化床颗粒分布性能的实验研究·2,447,543篇论文数据，部分数据来源于NoteExpress
同一长度的振动梁，工作频率越高，振幅不均匀度越大。
In addition, the amplitude distribution asymmetry is bigger if the frequency is higher when the length of beam is the same.
利用红外灯阵模拟空间外热流前，需对灯阵的热流密度不均匀度进行测试。
Before simulating the infrared influx using infrared lamp array, it is necessary to measure the uneven influx distribution.
提出了最小溢流强度、最小液面高度及液体分布不均匀度的概念，并找出了它们之间的关系。
Concepts of the minimum sprinkling flow density, the minimum liquid-level height and liquid distribution heterogeneity are developed. The relations between them are given.
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