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以上为机器翻译结果，长、整句建议使用 人工翻译 。
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The cryogenic optical experiment equipment was comprised of cryogenic vacuum chamber, vacuum set, ZYGO interferometer, proof vibration sub-system and controlled measuring temperature 'sub-system.
该实验装置包括低温真空腔体、真空抽气系统、ZYGO干涉仪和防震平台以及监控测温系统。
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