综述了 ULSI互连中纳米多孔二氧化硅 (NPS)电介质主要品种干燥凝胶 (Xerogel)的典型制造工艺 ,给出并分析了介电常数、应力、热导率和机械强度等主要特性 ,最后评述了有关应用前
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Silica Xerogel 干凝胶
xerogel l 干凝胶
carbon xerogel 炭干凝胶 ; 碳干凝胶
xerogel thin film 干凝胶薄膜
nano sized silica xerogel SiO2纳米干凝胶
Silicon xerogel for toothpaste 牙膏用二氧化硅
xerogel film 干凝胶薄膜
binary xerogel 二元气凝胶
The gel is called xerogel by using non-supercritical drying.
当采用非超临界干燥法制得的凝胶称为干凝胶。
The mesoporous silica-based xerogel had been synthesized using improved sol-gel method.
本研究利用改进的溶胶-凝胶工艺合成了介孔硅基干凝胶。
Using potassium silicate as silicon source, formamide as catalyst, a series of silica xerogel monolithic columns with different consistencies were prepared.
以硅酸钾为硅源,甲酰胺为催化剂在毛细管内原位聚合形成干凝胶柱,制备了一系列致密度不同的整体柱。
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