... 光刻 photolithography X射线光刻 X-ray lithography 电子束光刻 electron beam lithography ...
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x ray lithography X射线光刻
x ray lithography x 射线光刻技术
soft X-ray lithography 软X射线光刻
x - ray lithography x射线光刻
x-ray lithography mask x射线光刻掩模
x-ray lithography system x射线光刻机
X-ray deep lithography X光深层光刻
soft x ray projection lithography 软x射线投影光刻
Soft X-ray interference lithography 软X射线干涉光刻
The design and fabrication of high aspect-ratio hard X-ray zone plates by X-ray lithography are studied.
对利用X射线光刻制作大高宽比硬x射线波带片的设计和制作工艺进行了研究。
In synchrotron radiation X-Ray lithography, distortion of mask is caused by its initial tension, stress and inhomogeneous thermal effect.
在同步辐射X射线光刻中,由于掩模的初始张应力和掩膜的非均匀受热将使掩模产生热畸变。
The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.
针对X射线透射光栅摄谱仪中的高线密度光栅,研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术。
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