The overexposure technique is valuable for fabrication of devices with stabilized linewidth such as integrated optical gyroscope with spiral waveguide.
过曝光技术对线宽稳定度要求较高的器件，比如具有螺线波导的集成光学陀螺的制作有较重要价值。
This thesis work has researched the fabrication technics of photonic crystal defect waveguide with air-bridge structure and collecting waveguide;
本论文对空气桥结构光子晶体带隙限制光波导及其接续光波导的制作工艺进行了研究。
In this thesis, ion implantation has been used to form the waveguide and the performance of the waveguide has been studied in order to obtain the optimal fabrication conditions.
在本论文中，我们即采用了离子注入方法来制备光波导，研究所制备的波导的性能，以优化制备条件。
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