wafer r leveling 晶片平整
Image quality is the key performance of the optical lithography tool and it relies on the performance of wafer focusing and leveling measurement system.
成像质量是光学光刻机的最主要指标，硅片调焦调平测量是光刻机控制成像质量的基础。
The Test Bench built for Wafer Focusing and Leveling Sensor is to measure and evaluate its performance.
硅片调焦调平测量系统测试平台用于对光刻机硅片调焦调平测量系统的性能进行检测。
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