• 晶圆磨床 - 引用次数：4

  Principle of measurement and composition of the piezo-quartz system are expounded, and reasonable crystal groups and test circuit are selected. Then on-line force-measuring platform of wafer grinder is designed.

  分析了压电测试系统的组成和测量原理，选择了合理的压电晶组和测试线路，设计了晶圆磨床在线测量动态磨削力的测力平台。

  参考来源 - 晶圆磨床磨削力在线测量系统的研究与设计

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