LS series wet roots vacuum pump is a rough vacuum pumping equipment.

LS型直排大气湿式罗茨真空泵属粗真空获得设备。

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At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.

在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。

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The system of VPI equipment mainly includes vacuum chamber, heating unit, worktable with its drive unit, vacuum pumping unit, gas-charge unit and control unit, etc.

该设备主要出密封罐、加热系统、升降工作台、真空系统、充气系统、控制系统及密封罐水冷系统等组成。

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