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This paper describes the method of metal tip fabrication for vacuum microelectronics.
介绍了真空微电子中金属尖阴极的制备方法。
As the core content of vacuum microelectronics, the performance of field emitter array (FEA) directly influences the whole performance of field emission device.
场发射阵列阴极(FEA)作为真空微电子学的核心内容，其性能的好坏直接影响着场发射器件的总体性能。
After a brief introduction to field emission and Vacuum microelectronics, the author focuses on field emission display (FED), which is made according to principle of Vacuum microelectronics.
简要介绍场致发射与真空微电子的一般情况，尔后着重介绍应用真空微电子原理制作的场发射平板显示器(FED)。
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