There are water cooling target chuck and back flanges on the top of the vacuum chamber.
真空室顶部预留了法兰口并配有冷却靶台。
The Alcatel vacuum Technology product-range includes vacuum pumps, leak detectors, vacuum gauges, plasma sensors, valves, flanges and fitting.
阿尔卡特真空技术的产品包括真空泵，检漏仪，真空计，等离子传感器，阀门，法兰及其配件。
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